Effects of heavy ion irradiation on amorphous hydrogenated (diamondlike) carbon films

Journal Article · Fri May 01 04:00:00 EDT 1987 · J. Appl. Phys.; (United States)

DOI:https://doi.org/10.1063/1.338410· OSTI ID:6736765

Prawer, S; Kalish, R; Adel, M; Richter, V

Energetic ion-beam irradiation of diamondlike carbon thin films induces a decrease of 5--6 orders of magnitude in the resistivity of the films from their as-grown value of 10/sup 7/ ..cap omega.. cm. Diagnostics used to characterize the nature of the transformation included optical absorption measurements (band gap), Raman spectroscopy (microcrystalline structure), Rutherford backscattering spectroscopy (hydrogen content of the films), and measurements of the temperature dependence of the conductivity (electronic structure). It was found that the initial decrease in resistivity with an increasing ion dose is due to the loss of hydrogen from the films, with a concomitant decrease in the optical band gap. Heating the films during the irradiation greatly accelerates the rate of hydrogen loss as a function of dose. Once the hydrogen removal is complete, further irradiation increases the film conductivity by inducing the growth of microcrystallites of graphite.

• Research Organization: Solid State Institute, Technion Israel Institute of Technology, Haifa, Israel
• OSTI ID: 6736765
• Journal Information: J. Appl. Phys.; (United States), Journal Name: J. Appl. Phys.; (United States) Vol. 61:9; ISSN JAPIA
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360605* -- Materials-- Radiation Effects
BACKSCATTERING
CARBON
CHEMICAL COMPOSITION
CHEMICAL REACTIONS
COLLISIONS
CRYSTAL GROWTH
CRYSTAL STRUCTURE
DIAMONDS
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
ELECTRONIC STRUCTURE
ELEMENTAL MINERALS
ELEMENTS
ENERGY GAP
GRAPHITE
HYDROGENATION
IMPURITIES
ION COLLISIONS
IRRADIATION
LASER SPECTROSCOPY
MICROSTRUCTURE
MINERALS
NONMETALS
OPACITY
OPTICAL PROPERTIES
PHYSICAL PROPERTIES
PHYSICAL RADIATION EFFECTS
RADIATION EFFECTS
RAMAN SPECTROSCOPY
SCATTERING
SPECTROSCOPY
TEMPERATURE DEPENDENCE