A scanning tunneling microscope/scanning electron microscope system for the fabrication of nanostructures

Journal Article · · Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena; (United States)

DOI:https://doi.org/10.1116/1.585201· OSTI ID:5182142

Ehrichs, E E; Smith, W F; de Lozanne, A L ^[1]

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1. Univ. of Texas, Austin (United States)

The authors report on an ultrahigh vacuum (UHV) scanning tunneling microscope (STM) designed to work in conjunction with a commercial, high-vacuum scanning electron microscope (SEM). The STM resides in its own UHV subchamber which is housed in the JEOL 820 SEM. The authors have used the SEM to image the STM tip and its location on the sample. This instrument was built to fabricate and study metallic and contamination resist nanostructures and devices on semiconductor surfaces. To create these structures, the authors use a technique developed in our lab which uses the STM to dissociate organometallic gases or organic residues on semiconductor surfaces. Our system allows precise alignment of the STM-fabricated structures with underlying macroscopic contact pads. The UHV subchamber, which includes standard UHV sample preparation and analysis equipment, is required to prepare atomically flat and clean samples.

• OSTI ID: 5182142
• Journal Information: Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena; (United States), Journal Name: Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena; (United States) Vol. 9:2; ISSN 0734-211X; ISSN JVTBD
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING
426000* -- Engineering-- Components
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COATINGS
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FABRICATION
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MICROELECTRONICS
MICROSCOPY
ORGANIC COMPOUNDS
ORGANOMETALLIC COMPOUNDS
SCANNING ELECTRON MICROSCOPY
SEMICONDUCTOR DEVICES
SEMICONDUCTOR MATERIALS
ULTRAHIGH VACUUM