Scanning tunneling microscope combined with scanning electron microscope for the study of grain boundaries

Journal Article · Sat Oct 01 00:00:00 EDT 1994 · Review of Scientific Instruments; (United States)

DOI:https://doi.org/10.1063/1.1144550· OSTI ID:7203332

Thibado, P M ^[1]; Liang, Y; Bonnell, D A ^[2]

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1. Physics Department, The University of Pennsylvania, Philadelphia, Pennsylvania 19104 (United States)
2. Materials Science and Engineering, The University of Pennsylvania, Philadelphia, Pennsylvania 19104 (United States)

An instrument that incorporates a scanning electron microscope (SEM) and a scanning tunneling microscope (STM) in an ultrahigh vacuum environment was designed to address the specific difficulties of imaging heterogeneous surfaces. A sample may be mounted in the STM for simultaneous STM and SEM imaging, or transferred to a manipulator where other surface analytical tools may be utilized. The STM is based on a viton-stainless-steel stack design and the SEM employs a 5 kV, electrostatic-lens electron gun. The sample mount is fixed, while the tip can be positioned in three orthogonal directions. Macroscopic positioning of the tip is accomplished using two orthogonal linear piezoelectric inchworm'' motors and a stepper motor, whereas microscopic positioning is accomplished with a piezoelectric tube scanner

• DOE Contract Number: FG02-90ER45428
• OSTI ID: 7203332
• Journal Information: Review of Scientific Instruments; (United States), Vol. 65:10; ISSN 0034-6748
• Country of Publication: United States
• Language: English

Related Subjects

75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
GRAIN BOUNDARIES
ELECTRON MICROSCOPY
CRYSTAL DEFECTS
ELECTRON DETECTION
ELECTRON DIFFRACTION
MASS SPECTROMETERS
ULTRAHIGH VACUUM
CHARGED PARTICLE DETECTION
COHERENT SCATTERING
CRYSTAL STRUCTURE
DETECTION
DIFFRACTION
MEASURING INSTRUMENTS
MICROSCOPY
MICROSTRUCTURE
RADIATION DETECTION
SCATTERING
SPECTROMETERS
665000* - Physics of Condensed Matter- (1992-)