Vacuum deposited polycrystalline silicon films for solar cell applications. Quarterly report, 1 April-30 June 1980
Polycrystalline p-type films were vacuum deposited onto TiB/sub 2/ coated alumina and sapphire substrates. Epitaxial layers were also formed on single crystal silicon substrates. Junctions in the layers were created by both gaseous diffusion in a tube furnace and by vacuum deposition. The TiB/sub 2/ vacuum deposited bottom electrodes have resistivities between 30 and 40 ..mu.. ..cap omega..-cm. All-vacuum-deposited solar cells were fabricated for the first time. Efficiencies approaching those in the diffused junction devices were achieved. The n-layers were deposited on the previously deposited p-layer/TiB/sub 2//ceramic sandwiches by vacuum deposition of silicon in a phosphine (PH/sub 3/) atmosphere. Photovoltaic data in diffused junction samples, including efficiency and spectral response measurements, indicate that crystallite size may no longer be the limiting factor in achieving high efficiency; rather, performance is now being limited by the presence of impurities in the vacuum deposition silicon base region.
- Research Organization:
- Johns Hopkins Univ., Laurel, MD (USA). Applied Physics Lab.
- DOE Contract Number:
- AC02-77CH00178
- OSTI ID:
- 5167400
- Report Number(s):
- SERI/PR-8278-1-T3
- Country of Publication:
- United States
- Language:
- English
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Vacuum deposited polycrystalline silicon films for solar cell applications. Second quarterly technical progress report. January 1-March 31, 1980
Vacuum deposited polycrystalline silicon films for solar cell applications. Quarterly technical progress report No. 1, September 29-December 31, 1978
Related Subjects
140501* -- Solar Energy Conversion-- Photovoltaic Conversion
36 MATERIALS SCIENCE
360601 -- Other Materials-- Preparation & Manufacture
ALUMINIUM COMPOUNDS
ALUMINIUM OXIDES
BORIDES
BORON COMPOUNDS
CHALCOGENIDES
CHEMICAL ANALYSIS
CLEANING
CORUNDUM
CRYSTALS
DATA
DATA FORMS
DEPOSITION
DIFFUSION
DIRECT ENERGY CONVERTERS
EFFICIENCY
ELEMENTS
EQUIPMENT
FABRICATION
FILMS
GRAPHS
IMPURITIES
INFORMATION
ION MICROPROBE ANALYSIS
JUNCTIONS
MASS SPECTROSCOPY
MATERIALS
MINERALS
NONDESTRUCTIVE ANALYSIS
OXIDES
OXYGEN COMPOUNDS
P-TYPE CONDUCTORS
PERFORMANCE
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
POLYCRYSTALS
SAPPHIRE
SEMICONDUCTOR JUNCTIONS
SEMICONDUCTOR MATERIALS
SEMIMETALS
SILICON
SILICON SOLAR CELLS
SOLAR CELLS
SOLAR EQUIPMENT
SPECTRAL RESPONSE
SPECTROSCOPY
SUBSTRATES
SURFACE CLEANING
SURFACE COATING
SURFACE FINISHING
TITANIUM BORIDES
TITANIUM COMPOUNDS
TRANSITION ELEMENT COMPOUNDS
VACUUM COATING