Vacuum deposited polycrystalline silicon films for solar cell applications. Quarterly report, 1 April-30 June 1980

Technical Report · Fri Aug 01 00:00:00 EDT 1980

DOI:https://doi.org/10.2172/5167400· OSTI ID:5167400

Feldman, C.; Blum, N. A.; Satkiewicz, F. G.

Polycrystalline p-type films were vacuum deposited onto TiB/sub 2/ coated alumina and sapphire substrates. Epitaxial layers were also formed on single crystal silicon substrates. Junctions in the layers were created by both gaseous diffusion in a tube furnace and by vacuum deposition. The TiB/sub 2/ vacuum deposited bottom electrodes have resistivities between 30 and 40 ..mu.. ..cap omega..-cm. All-vacuum-deposited solar cells were fabricated for the first time. Efficiencies approaching those in the diffused junction devices were achieved. The n-layers were deposited on the previously deposited p-layer/TiB/sub 2//ceramic sandwiches by vacuum deposition of silicon in a phosphine (PH/sub 3/) atmosphere. Photovoltaic data in diffused junction samples, including efficiency and spectral response measurements, indicate that crystallite size may no longer be the limiting factor in achieving high efficiency; rather, performance is now being limited by the presence of impurities in the vacuum deposition silicon base region.

• Research Organization: Johns Hopkins Univ., Laurel, MD (USA). Applied Physics Lab.
• DOE Contract Number: AC0277CH00178
• OSTI ID: 5167400
• Report Number(s): SERI/PR-8278-1-T3
• Country of Publication: United States
• Language: English

Related Subjects

14 SOLAR ENERGY
36 MATERIALS SCIENCE
SILICON
VACUUM COATING
SILICON SOLAR CELLS
FABRICATION
ALUMINIUM OXIDES
DATA
DIFFUSION
EFFICIENCY
FILMS
GRAPHS
IMPURITIES
ION MICROPROBE ANALYSIS
MASS SPECTROSCOPY
P-TYPE CONDUCTORS
PERFORMANCE
POLYCRYSTALS
SAPPHIRE
SEMICONDUCTOR JUNCTIONS
SPECTRAL RESPONSE
SUBSTRATES
SURFACE CLEANING
TITANIUM BORIDES
ALUMINIUM COMPOUNDS
BORIDES
BORON COMPOUNDS
CHALCOGENIDES
CHEMICAL ANALYSIS
CLEANING
CORUNDUM
CRYSTALS
DATA FORMS
DEPOSITION
DIRECT ENERGY CONVERTERS
ELEMENTS
EQUIPMENT
INFORMATION
JUNCTIONS
MATERIALS
MINERALS
NONDESTRUCTIVE ANALYSIS
OXIDES
OXYGEN COMPOUNDS
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
SEMICONDUCTOR MATERIALS
SEMIMETALS
SOLAR CELLS
SOLAR EQUIPMENT
SPECTROSCOPY
SURFACE COATING
SURFACE FINISHING
TITANIUM COMPOUNDS
TRANSITION ELEMENT COMPOUNDS
140501* - Solar Energy Conversion- Photovoltaic Conversion
360601 - Other Materials- Preparation & Manufacture