Vacuum deposited polycrystalline silicon films for solar cell applications. Quarterly technical progress report No. 1, September 29-December 31, 1978
A vacuum deposition technique for forming polycrystalline silicon solar cells is being explored. Transition metal diboride layers, being examined as the cell's bottom electrode, were deposited on single crystal (sapphire) and polycrystalline (alumina) Al/sub 2/O/sub 3/ substrates. Graphite substrates were also examined. Boron doped p-type silicon layers were formed by co-deposition in the vacuum at substrate temperature between 1100/sup 0/C and 1200/sup 0/C. Silicon grain size in the films was between 4 ..mu..m and 6 ..mu..m depending on the deposition conditions (supersaturation ratio). The n-type silicon layer was formed by gaseous diffusion into the p-type layer. Detailed secondary-ion mass spectra analysis of silicon, metal borides and substrates was carried out. The most satisfactory devices used TiB/sub 2/ electrodes on alumina substrates. Solar cell AM 2 efficiencies of 1.8% were about the same as the planar cells formed previously by double-diffusion.
- Research Organization:
- Johns Hopkins Univ., Laurel, MD (USA). Applied Physics Lab.
- DOE Contract Number:
- ET-78-A-03-2208
- OSTI ID:
- 5868225
- Report Number(s):
- SAN-2208-T1
- Country of Publication:
- United States
- Language:
- English
Similar Records
Vacuum-deposited polycrystalline silicon films for solar-cell applications. Final technical report, September 14, 1979-December 1, 1980
Vacuum deposited polycrystalline silicon films for solar cell applications. Quarterly technical progress report No. 2, January 1-March 31, 1979
Related Subjects
36 MATERIALS SCIENCE
SILICON
VACUUM COATING
SILICON SOLAR CELLS
FABRICATION
PERFORMANCE
ALUMINIUM OXIDES
BORON
CHEMICAL COMPOSITION
CRYSTAL DOPING
DIFFUSION
DIFFUSION LENGTH
EFFICIENCY
FILMS
GRAIN SIZE
GRAPHITE
IMPURITIES
LASER-RADIATION HEATING
MASS SPECTROSCOPY
POLYCRYSTALS
RECRYSTALLIZATION
SPECTRAL RESPONSE
SUBSTRATES
X-RAY DIFFRACTION
ALUMINIUM COMPOUNDS
CARBON
CHALCOGENIDES
COHERENT SCATTERING
CRYSTAL STRUCTURE
CRYSTALS
DEPOSITION
DIFFRACTION
DIRECT ENERGY CONVERTERS
ELEMENTS
HEATING
MICROSTRUCTURE
NONMETALS
OXIDES
OXYGEN COMPOUNDS
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
PLASMA HEATING
SCATTERING
SEMIMETALS
SIZE
SOLAR CELLS
SPECTROSCOPY
SURFACE COATING
140501* - Solar Energy Conversion- Photovoltaic Conversion
360601 - Other Materials- Preparation & Manufacture