Synthesis and preparation of lanthanum aluminate target for radio-frequency magnetron sputtering
- Research Dept., Electronics and Telecommunications Research Inst., Daeduk Science Town, Daejeon (KR)
This paper reports on the preparation and synthesis of a polycrystalline LaAlO{sub 3} target for the radio-frequency (rf) magnetron sputterings of LaAlO{sub 3} thin films. These films serve as a buffer layer for high-T{sub c} YBa{sub 2}Cu{sub 3}O{sub 7{minus}x} superconducting thin films on Si. Synthesis of lanthanum aluminate powder from a mixture of La{sub 2}O{sub 3} and Al{sub 2}O{sub 3} powders was performed by calcining from 1000{degrees} to 1600{degrees}C in air. Characterization of the calcined powders by x-ray diffraction indicates that full development of LaAlO{sub 3} phase was evident in the sample calcined for 3 h at 1600{degrees}C in air. A polycrystalline LaAlO{sub 3} target was prepared by heat treatment at 1500{degrees} for 2 h in air after pressureless sintering at 1750{degrees}C for 3 h in Ar. Thin films of the LaAlO{sub 3} on Si (100) were obtained by rf magnetron sputtering using the target and oxygen-annealing the as-deposited films.
- OSTI ID:
- 5163041
- Journal Information:
- Journal of the American Ceramic Society; (United States), Journal Name: Journal of the American Ceramic Society; (United States) Vol. 74:2; ISSN JACTA; ISSN 0002-7820
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
ALUMINATES
ALUMINIUM COMPOUNDS
ANNEALING
CALCINATION
CHEMICAL REACTIONS
COHERENT SCATTERING
DECOMPOSITION
DIFFRACTION
FABRICATION
FILMS
HEAT TREATMENTS
HIGH-TC SUPERCONDUCTORS
LANTHANUM COMPOUNDS
OXYGEN COMPOUNDS
POWDERS
PYROLYSIS
RARE EARTH COMPOUNDS
SCATTERING
SINTERING
SPUTTERING
SUPERCONDUCTING FILMS
SUPERCONDUCTORS
TARGETS
THERMOCHEMICAL PROCESSES
THIN FILMS
X-RAY DIFFRACTION