Rutherford Backscattering Spectrometry: A quantitative technique for chemical and structural analysis of surfaces and thin films

Journal Article · Sun Jun 01 00:00:00 EDT 1986 · RCA Rev.; (United States)

OSTI ID:5162083

Magee, C W; Hewitt, L R

This review paper on Rutherford Backscattering Spectrometry (RBS) presents the basics of MeV helium-ion scattering from solids. The instrumentation used in RBS is discussed, as well as some of the mathematical formalism needed by the user of the technique to understand and have confidence in the great quantitative power of RBS. Examples are included to illustrate the application of the technique to (1) surface analysis, (2) the determination of thin-film elemental composition, and (3) crystal-structure investigation of single-crystal thin films.

• Research Organization: RCA Labs., Princeton, NJ 08543-0432
• OSTI ID: 5162083
• Journal Information: RCA Rev.; (United States), Journal Name: RCA Rev.; (United States) Vol. 47:2; ISSN RCARC
• Country of Publication: United States
• Language: English

Related Subjects

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
400103* -- Radiometric & Radiochemical Procedures-- (-1987)
CHARGED PARTICLES
CHEMICAL ANALYSIS
CRYSTAL STRUCTURE
CRYSTALS
ELASTIC SCATTERING
ENERGY RANGE
FILMS
HELIUM IONS
IONS
MEV RANGE
MONOCRYSTALS
QUANTITATIVE CHEMICAL ANALYSIS
RUTHERFORD SCATTERING
SCATTERING
SOLIDS
STRUCTURAL CHEMICAL ANALYSIS
SURFACES
THIN FILMS