Excimer pulse-periodic laser
Journal Article
·
· Sov. J. Quant. Electron. (Engl. Transl.); (United States)
A pulse-periodic electric-discharge KrF excimer laser was constructed. Its output power was 20 W at a repetition frequency of 100 Hz. The gas mixture was driven through the laser in a closed-cycle system. The efficiency of the laser was 0.5%.
- Research Organization:
- I. V. Kurchatov Institute of Atomic Energy, Academy of Sciences of the USSR, Moscow
- OSTI ID:
- 5160761
- Journal Information:
- Sov. J. Quant. Electron. (Engl. Transl.); (United States), Journal Name: Sov. J. Quant. Electron. (Engl. Transl.); (United States) Vol. 10:4; ISSN SJQEA
- Country of Publication:
- United States
- Language:
- English
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