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High-pulse-rate 10-W KrF laser

Journal Article · · J. Appl. Phys.; (United States)
DOI:https://doi.org/10.1063/1.324359· OSTI ID:5239987
A discharge-pumped KrF excimer laser, utilizing a rapid recirculation of atmospheric-pressure gas, has generated 10 W of average output power at a pulse repetition rate of 1 kHz. The usual spark gap was replaced with a hydrogen thyratron for the switch in the pulse-forming network, and a corona discharge was used as the source for discharge preionization. Operating at 30 psi (absolute) and at a pulse rate of 2 Hz, a similar device has generated output pulse energies of 100 mJ at 1% efficiency and 80 mJ at 1.6% efficiency.
Research Organization:
GTE Sylvania Incorporated, Electronic Systems Group--Western Division, Post Office Box 188, Mountain View, California 94042
OSTI ID:
5239987
Journal Information:
J. Appl. Phys.; (United States), Journal Name: J. Appl. Phys.; (United States) Vol. 49:1; ISSN JAPIA
Country of Publication:
United States
Language:
English