Optimization of the average power of pulsed-periodic KrF and XeCl excimer lasers

Journal Article · Tue Sep 01 04:00:00 EDT 1981 · Sov. J. Quant. Electron. (Engl. Transl.); (United States)

DOI:https://doi.org/10.1070/QE1981v011n09ABEH008215· OSTI ID:5587841

Baranov, V Y; Borisov, V M; Vysikailo, F I; Kiryukhin, Y B; Smirnov, N Y

The possibility is considered of increasing the average power of KrF and XeCl excimer lasers operating in the pulse-periodic regime without raising the circulation velocity of the gas mixture around the closed loop. By improving the homogeneity and stability of the volume discharge, an average power of approx.40 W was achieved and laser operation over a period of many hours was obtained.

• OSTI ID: 5587841
• Journal Information: Sov. J. Quant. Electron. (Engl. Transl.); (United States), Journal Name: Sov. J. Quant. Electron. (Engl. Transl.); (United States) Vol. 11:9; ISSN SJQEA
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING
420300* -- Engineering-- Lasers-- (-1989)
CHLORIDES
CHLORINE COMPOUNDS
EMISSION
ENERGY-LEVEL TRANSITIONS
FLUORIDES
FLUORINE COMPOUNDS
GAS LASERS
HALIDES
HALOGEN COMPOUNDS
KRYPTON COMPOUNDS
KRYPTON FLUORIDES
LASERS
OPTIMIZATION
POWER
RARE GAS COMPOUNDS
STIMULATED EMISSION
XENON CHLORIDES
XENON COMPOUNDS