Deformations and nonlinearity in scanning tunneling microscope images

Journal Article · · Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena; (United States)

DOI:https://doi.org/10.1116/1.585480· OSTI ID:5152069

Libioulle, L; Ronda, A; Taborelli, M; Gilles, J M ^[1]

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1. Univ. of Namur (Belgium)

This paper describes a complete determination of the relation between applied voltage and displacement for a tripod piezoceramic scanning microscope (STM) scanner unit. The absolute calibration is obtained in two steps. First the gap between two capacitor plates is modified by the expansion of the piezoelectric tube driven at various voltages and frequencies. Second, they image by STM some well-known surfaces: an optical diffraction grating and highly oriented pyrolytic graphite for large and atomic scales, respectively. For the voltage versus expansion relation they consider both nonlinearity sources, which induce relevant image deformations: static hysteresis and time-retarded response or creep. This characterization of the scanning unit in the STM operating conditions (voltage and frequencies) allows a suitable image restoration.

• OSTI ID: 5152069
• Journal Information: Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena; (United States), Journal Name: Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena; (United States) Vol. 9:2; ISSN 0734-211X; ISSN JVTBD
• Country of Publication: United States
• Language: English

Related Subjects

440800* -- Miscellaneous Instrumentation-- (1990-)
47 OTHER INSTRUMENTATION
CALIBRATION
CARBON
DEFORMATION
DIFFRACTION GRATINGS
ELECTRON MICROSCOPES
ELECTRON MICROSCOPY
ELEMENTAL MINERALS
ELEMENTS
GRAPHITE
GRATINGS
HYSTERESIS
IMAGES
MICROSCOPES
MICROSCOPY
MINERALS
NONMETALS
TIME DEPENDENCE
TRANSDUCERS