Modeling an optical micromachine probe
Silicon micromachines are fabricated using Surface Micro-Machining (SMM) techniques. Silicon micromachines include engines that consist of orthogonally oriented linear comb drive actuators mechanically connected to a rotating gear. These gears are as small a 50-{micro}m in diameter and can be driven at rotation rates exceeding 300,000-rpm. Measuring and analyzing microengine performance is basic to micromachine development and system applications. Optical techniques offer the potential for measuring long term statistical performance data and transient responses needed to optimize designs and manufacturing techniques. The authors describe the modeling of an optical probe developed at Sandia National Laboratories. Experimental data will be compared with output from the model.
- Research Organization:
- Sandia National Labs., Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 510330
- Report Number(s):
- SAND--97-1594C; CONF-970706--3; ON: DE97007137
- Country of Publication:
- United States
- Language:
- English
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