Optical measurement of micromachine engine performance
Conference
·
OSTI ID:519118
Understanding the mechanisms that impact the performance of Microelectromechanical Systems (MEMS) is essential to the development of optimized designs and drive signals, as well as the qualification of devices for commercial applications. Silicon micromachines include engines that consist of orthogonally oriented linear comb drive actuators mechanically connected to a rotating gear. These gears are as small as 50 {mu}m in diameter and can be driven at rotation rates exceeding 300,000 rpm. Optical techniques offer the potential for measuring long term statistical performance data and transient responses needed to optimize designs and manufacturing techniques. The authors describe the development of Micromachine Optical Probe (MOP) technology for the evaluation of micromachine performance. The MOP approach is based on the detection of optical signals scattered by the gear teeth or other physical structures. They present experimental results for a prototype system designed to measure engine parameters as well as long term performance data.
- Research Organization:
- Sandia National Labs., Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 519118
- Report Number(s):
- SAND--97-1653C; CONF-970968--1; ON: DE97007138
- Country of Publication:
- United States
- Language:
- English
Similar Records
An optical probe for micromachine performance analysis
Modeling an optical micromachine probe
A Method for Achieving Constant Rotation Rates in a Micro-Orthogonal Linkage System
Conference
·
Tue Dec 31 23:00:00 EST 1996
·
OSTI ID:434370
Modeling an optical micromachine probe
Conference
·
Fri Aug 01 00:00:00 EDT 1997
·
OSTI ID:510330
A Method for Achieving Constant Rotation Rates in a Micro-Orthogonal Linkage System
Journal Article
·
Wed May 12 00:00:00 EDT 1999
· Journal of Micromechanics and Microengineering
·
OSTI ID:7041