Surface-micromachined gear trains driven by an on-chip electrostatic microengine

Journal Article · Mon Jul 01 00:00:00 EDT 1996 · IEEE Electron Device Letters

DOI:https://doi.org/10.1109/55.506369· OSTI ID:276567

Sniegowski, J J; Garcia, E J ^[1]

---

1. Sandia National Labs., Albuquerque, NM (United States)

Test results for a polysilicon, surface-micromachined, electrostatically-actuated microengine driving multiple gears are presented. The microengine provides output in the form of a continuously rotating output gear (50 {micro}m in diameter) that is capable of delivering torque to additional geared mechanisms. The microengine can be operated at varying speeds and its motion can be reversed. A rotational speed of up to 200,000 r/min while driving multiple gears has been obtained. Drive of a 1,600 {micro}m diameter optical shutter has also been demonstrated. The resultant microengine and gear train, produced by polysilicon surface-micromachining techniques, are completely batch-fabricated without the need for piece-part assembly.

• Research Organization: Sandia National Laboratory
• DOE Contract Number: AC04-94AL85000
• OSTI ID: 276567
• Journal Information: IEEE Electron Device Letters, Journal Name: IEEE Electron Device Letters Journal Issue: 7 Vol. 17; ISSN 0741-3106; ISSN EDLEDZ
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING
ACTUATORS
CONTROL EQUIPMENT
DESIGN
FABRICATION
GEARS
PERFORMANCE TESTING
USES