Microfabricated microengine with constant rotation rate
- Albuquerque, NM
A microengine uses two synchronized linear actuators as a power source and converts oscillatory motion from the actuators into constant rotational motion via direct linkage connection to an output gear or wheel. The microengine provides output in the form of a continuously rotating output gear that is capable of delivering drive torque at a constant rotation to a micromechanism. The output gear can have gear teeth on its outer perimeter for directly contacting a micromechanism requiring mechanical power. The gear is retained by a retaining means which allows said gear to rotate freely. The microengine is microfabricated of polysilicon on one wafer using surface micromachining batch fabrication.
- Research Organization:
- SANDIA CORP
- DOE Contract Number:
- AC04-94AL85000
- Assignee:
- Sandia Corporation (Albuquerque, NM)
- Patent Number(s):
- US 5955801
- OSTI ID:
- 872529
- Country of Publication:
- United States
- Language:
- English
Friction and wear in microfabricated harmonic side-drive motors
|
conference | January 1990 |
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Microfabricated microengine for use as a mechanical drive and power source in the microdomain and fabrication process
Microfabricated microengine for use as a mechanical drive and power source in the microdomain and fabrication process
Related Subjects
actuators
allows
batch
batch fabrication
capable
connection
constant
constant rotation
contacting
continuously
continuously rotating
converts
converts oscillatory
delivering
direct
direct linkage
directly
drive
fabrication
form
freely
gear
gear teeth
linear
linear actuator
linear actuators
linkage
linkage connection
means
mechanical
mechanical power
microengine
microfabricated
microfabricated microengine
micromachining
micromachining batch
micromechanism
motion
motion via
oscillatory
oscillatory motion
outer
outer perimeter
output
output gear
perimeter
polysilicon
power
power source
provides
provides output
rate
requiring
retained
retaining
retaining means
rotate
rotating
rotation
rotational
rotational motion
source
surface
surface micromachining
synchronized
synchronized linear
teeth
torque
via
via direct
wafer
wheel