Microfabricated microengine for use as a mechanical drive and power source in the microdomain and fabrication process

Patent · Tue Dec 31 23:00:00 EST 1996

OSTI ID:870959

Garcia, Ernest J ^[1]; Sniegowski, Jeffry J ^[1]

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1. Albuquerque, NM

A microengine uses two synchronized linear actuators as a power source and converts oscillatory motion from the actuators into rotational motion via direct linkage connection to an output gear or wheel. The microengine provides output in the form of a continuously rotating output gear that is capable of delivering drive torque to a micromechanism. The microengine can be operated at varying speeds and its motion can be reversed. Linear actuators are synchronized in order to provide linear oscillatory motion to the linkage means in the X and Y directions according to a desired position, rotational direction and speed of said mechanical output means. The output gear has gear teeth on its outer perimeter for directly contacting a micromechanism requiring mechanical power. The gear is retained by a retaining means which allows said gear to rotate freely. The microengine is microfabricated of polysilicon on one wafer using surface micromachining batch fabrication.

• Research Organization: Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA
• DOE Contract Number: AC04-76DP00789
• Assignee: United States of America as represented by United States (Washington, DC)
• Patent Number(s): US 5631514
• OSTI ID: 870959
• Country of Publication: United States
• Language: English

Related Subjects

/310/74/
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actuators
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capable
connection
contacting
continuously
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converts
converts oscillatory
delivering
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direct
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direction
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gear
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linkage
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microdomain
microengine
microfabricated
microfabricated microengine
micromachining
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micromechanism
motion
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oscillatory
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outer
outer perimeter
output
output gear
output means
perimeter
polysilicon
position
power
power source
process
provide
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provides output
requiring
retained
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retaining means
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rotate
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source
speed
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surface
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synchronized
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