Preparation of Pb(Zr{sub 0.52}Ti{sub 0.48})O{sub 3} thin films on Pt/RuO{sub 2} double electrode by a new sol-gel route
Journal Article
·
· Journal of Materials Research
- Department of Ceramic Eng., YonSei University, 134 Shinchon-dong, Seoul, 120-749 (Korea)
- Division of Ceramics, Korea Institute of Science and Technology, P.O. Box 131, Cheongryang, Seoul, 130-650 (Korea)
Pb(Zr{sub 0.52}Ti{sub 0.48})O{sub 3} (PZT) thin film on Pt/RuO{sub 2} double electrode was successfully prepared by using new alkoxide{endash}alkanolamine, sol-gel method. It was observed that the use of Pt/RuO{sub 2} double electrode reduced leakage current, resulting in a marked improvement in the leakage characteristics and more reliable capacitors. Typical P-E hysteresis behavior was observed even at low applied voltage of 5 V, manifesting greatly improved remanance and coercivity. Fatigue and breakdown characteristic, measured at 5 V, showed stable behavior and no degradation in polarization was observed up to 10{sup 11} cycles.{copyright} {ital 1997 Materials Research Society.}
- OSTI ID:
- 508983
- Journal Information:
- Journal of Materials Research, Journal Name: Journal of Materials Research Journal Issue: 6 Vol. 12; ISSN JMREEE; ISSN 0884-2914
- Country of Publication:
- United States
- Language:
- English
Similar Records
Effect of top metallization on the dielectric and ferroelectric properties of sol-gel derived PZT thin films
Sol-gel processing of Pb(Zr{sub 0.52}, Ti{sub 0.48})O{sub 3} thin films: Dopant compensation mechanism and leakage current characteristics
Pressure-induced rotation of spontaneous polarization in monoclinic and triclinic PbZr{sub 0.52}Ti{sub 0.48}O{sub 3}
Conference
·
Fri Dec 30 23:00:00 EST 1994
·
OSTI ID:28856
Sol-gel processing of Pb(Zr{sub 0.52}, Ti{sub 0.48})O{sub 3} thin films: Dopant compensation mechanism and leakage current characteristics
Conference
·
Mon Dec 30 23:00:00 EST 1996
·
OSTI ID:535621
Pressure-induced rotation of spontaneous polarization in monoclinic and triclinic PbZr{sub 0.52}Ti{sub 0.48}O{sub 3}
Journal Article
·
Fri Dec 31 23:00:00 EST 2004
· Physical Review. B, Condensed Matter and Materials Physics
·
OSTI ID:20665036