Effect of top metallization on the dielectric and ferroelectric properties of sol-gel derived PZT thin films
- Donnelly Corp., Tucson, AZ (United States)
- Arizona Materials Labs., Tucson, AZ (United States)
Pt-PZT-Metal capacitors were prepared utilizing various top metallizations and PZT films which were previously fired to 700C to convert them into single-phase perovskite films. The dielectric (e.g. dielectric constants and leakage characteristics) and FE (e.g. remanent polarization and coercive field) properties were highly dependent in the choice of metals used. The highest dielectric constants were obtained for capacitors having noble or transition metals; the lowest leakage currents were obtained using Au or Pt top electrodes; and the highest polarizations (both remanent and spontaneous) were measured for capacitors having noble metals or Bi. There was not a consistent dependence of these properties (especially leakage currents) on the work function of the metal used. The electronegativity or affinity for oxygen of the electrode plays a more important role in affecting the junction characteristics. For several reactive top metals such as In, Zn, Cu and Al, the formation of interfacial oxide layers at the Pt-metal junctions leads to high values of coercive field ({approx}50kV/cm) compared to when noble metals or Zn are used ({approx}20-25kV/cm). The overall best dielectric and FE behaviors are derived from capacitors having noble metals, especially Pt, as the top and bottom electrodes.
- OSTI ID:
- 28856
- Report Number(s):
- CONF-931142--
- Country of Publication:
- United States
- Language:
- English
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