Amorphous silicon semiconductor film and production process thereof
Patent
·
OSTI ID:5069636
A solar cell is described including an amorphous silicon semiconductor film as a window of the solar cell, the film having a refractive index of 2.8 to 3.4, the total quantity of nitrogen and oxygen within the film being from 1 to below 4 atom %.
- Assignee:
- Toa Nenryo Kogyo K.K. Tokyo
- Patent Number(s):
- US 4726851
- OSTI ID:
- 5069636
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
14 SOLAR ENERGY
140501* -- Solar Energy Conversion-- Photovoltaic Conversion
36 MATERIALS SCIENCE
360601 -- Other Materials-- Preparation & Manufacture
360603 -- Materials-- Properties
AMORPHOUS STATE
DIRECT ENERGY CONVERTERS
ELEMENTS
EQUIPMENT
FABRICATION
FILMS
MATERIALS
NITROGEN
NONMETALS
OPENINGS
OPTICAL PROPERTIES
OXYGEN
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
PHYSICAL PROPERTIES
REFRACTIVITY
SEMICONDUCTOR MATERIALS
SEMIMETALS
SILICON
SILICON SOLAR CELLS
SOLAR CELLS
SOLAR EQUIPMENT
SYNTHESIS
THIN FILMS
WINDOWS
140501* -- Solar Energy Conversion-- Photovoltaic Conversion
36 MATERIALS SCIENCE
360601 -- Other Materials-- Preparation & Manufacture
360603 -- Materials-- Properties
AMORPHOUS STATE
DIRECT ENERGY CONVERTERS
ELEMENTS
EQUIPMENT
FABRICATION
FILMS
MATERIALS
NITROGEN
NONMETALS
OPENINGS
OPTICAL PROPERTIES
OXYGEN
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
PHYSICAL PROPERTIES
REFRACTIVITY
SEMICONDUCTOR MATERIALS
SEMIMETALS
SILICON
SILICON SOLAR CELLS
SOLAR CELLS
SOLAR EQUIPMENT
SYNTHESIS
THIN FILMS
WINDOWS