Aerosol chemical vapor deposition of metal oxide films

Patent Application · Mon Apr 16 00:00:00 EDT 1990

OSTI ID:5047361

Ott, K C; Kodas, T T

A process of preparing a film of a multicomponent metal oxide including: forming an aerosol from a solution comprised of a suitable solvent and at least two precursor compounds capable of volatilizing at temperatures lower than the decomposition temperature of said precursor compounds; passing said aerosol in combination with a suitable oxygen-containing carrier gas into a heated zone, said heated zone having a temperature sufficient to evaporate the solvent and volatilize said precursor compounds; and passing said volatilized precursor compounds against the surface of a substrate, said substrate having a sufficient temperature to decompose said volatilized precursor compounds whereby metal atoms contained within said volatilized precursor compounds are deposited as a metal oxide film upon the substrate is disclosed. In addition, a coated article comprising a multicomponent metal oxide film conforming to the surface of a substrate selected from the group consisting of silicon, magnesium oxide, yttrium-stabilized zirconium oxide, sapphire, or lanthanum gallate, said multicomponent metal oxide film characterized as having a substantially uniform thickness upon said substrate, and as having a crystalline orientation defined as predominantly C-axis oriented by x-ray diffraction is disclosed.

• Research Organization: Los Alamos National Lab., NM (United States)
• Sponsoring Organization: USDOE; USDOE, Washington, DC (United States)
• DOE Contract Number: W-7405-ENG-36
• Assignee: Dept. of Energy
• Patent Number(s): PATENTS-US-A7509120
• Application Number: ON: DE92017179; PPN: US 7-509120
• OSTI ID: 5047361
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
HIGH-TC SUPERCONDUCTORS
CHEMICAL VAPOR DEPOSITION
OXIDES
AEROSOLS
BARIUM OXIDES
COPPER OXIDES
FILMS
INVENTIONS
SUPERCONDUCTING FILMS
X-RAY DIFFRACTION
YTTRIUM OXIDES
ALKALINE EARTH METAL COMPOUNDS
BARIUM COMPOUNDS
CHALCOGENIDES
CHEMICAL COATING
COHERENT SCATTERING
COLLOIDS
COPPER COMPOUNDS
DEPOSITION
DIFFRACTION
DISPERSIONS
OXYGEN COMPOUNDS
SCATTERING
SOLS
SUPERCONDUCTORS
SURFACE COATING
TRANSITION ELEMENT COMPOUNDS
YTTRIUM COMPOUNDS
360201* - Ceramics
Cermets
& Refractories- Preparation & Fabrication