Aerosol chemical vapor deposition of metal oxide films
A process of preparing a film of a multicomponent metal oxide including: forming an aerosol from a solution comprised of a suitable solvent and at least two precursor compounds capable of volatilizing at temperatures lower than the decomposition temperature of said precursor compounds; passing said aerosol in combination with a suitable oxygen-containing carrier gas into a heated zone, said heated zone having a temperature sufficient to evaporate the solvent and volatilize said precursor compounds; and passing said volatilized precursor compounds against the surface of a substrate, said substrate having a sufficient temperature to decompose said volatilized precursor compounds whereby metal atoms contained within said volatilized precursor compounds are deposited as a metal oxide film upon the substrate is disclosed. In addition, a coated article comprising a multicomponent metal oxide film conforming to the surface of a substrate selected from the group consisting of silicon, magnesium oxide, yttrium-stabilized zirconium oxide, sapphire, or lanthanum gallate, said multicomponent metal oxide film characterized as having a substantially uniform thickness upon said substrate.
- DOE Contract Number:
- W-7405-ENG-36
- Assignee:
- PTO; EDB-94-064381
- Patent Number(s):
- A; US 5278138
- Application Number:
- PPN: US 7-774748
- OSTI ID:
- 5226424
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
360601* -- Other Materials-- Preparation & Manufacture
ALKALINE EARTH METAL COMPOUNDS
CHALCOGENIDES
CHEMICAL COATING
CHEMICAL VAPOR DEPOSITION
COATINGS
COMPOSITE MATERIALS
CORUNDUM
DEPOSITION
ELEMENTS
FABRICATION
GALLIUM COMPOUNDS
GALLIUM OXIDES
LANTHANUM COMPOUNDS
LANTHANUM OXIDES
MAGNESIUM COMPOUNDS
MAGNESIUM OXIDES
MATERIALS
MINERALS
OXIDE MINERALS
OXIDES
OXYGEN COMPOUNDS
RARE EARTH COMPOUNDS
SAPPHIRE
SEMIMETALS
SILICON
SURFACE COATING
TRANSITION ELEMENT COMPOUNDS
VAPOR DEPOSITED COATINGS
ZIRCONIUM COMPOUNDS
ZIRCONIUM OXIDES