Aerosol chemical vapor deposition of metal oxide films

Ott, Kevin C; Kodas, Toivo T

Aerosol chemical vapor deposition of metal oxide films

Patent · Fri Dec 31 23:00:00 EST 1993

OSTI ID:869121

Ott, Kevin C ^[1]; Kodas, Toivo T ^[2]

4745 Trinity Dr., Los Alamos, NM 87544
5200 Noreen Dr. NE., Albuquerque, NM 87111

A process of preparing a film of a multicomponent metal oxide including: forming an aerosol from a solution comprised of a suitable solvent and at least two precursor compounds capable of volatilizing at temperatures lower than the decomposition temperature of said precursor compounds; passing said aerosol in combination with a suitable oxygen-containing carrier gas into a heated zone, said heated zone having a temperature sufficient to evaporate the solvent and volatilize said precursor compounds; and passing said volatilized precursor compounds against the surface of a substrate, said substrate having a sufficient temperature to decompose said volatilized precursor compounds whereby metal atoms contained within said volatilized precursor compounds are deposited as a metal oxide film upon the substrate is disclosed. In addition, a coated article comprising a multicomponent metal oxide film conforming to the surface of a substrate selected from the group consisting of silicon, magnesium oxide, yttrium-stabilized zirconium oxide, sapphire, or lanthanum gallate, said multicomponent metal oxide film characterized as having a substantially uniform thickness upon said FIELD OF THE INVENTION The present invention relates to the field of film coating deposition techniques, and more particularly to the deposition of multicomponent metal oxide films by aerosol chemical vapor deposition. This invention is the result of a contract with the Department of Energy (Contract No. W-7405-ENG-36).

Research Organization:: Los Alamos National Laboratory (LANL), Los Alamos, NM

DOE Contract Number:: W-7405-ENG-36

Assignee:: Ott, Kevin C. (4745 Trinity Dr., Los Alamos, NM 87544);Kodas, Toivo T. (5200 Noreen Dr. NE., Albuquerque, NM 87111)

Patent Number(s):: US 5278138

OSTI ID:: 869121

Country of Publication:: United States

Language:: English

References (9)

Epitaxial growth of high T _c superconducting Y‐Ba‐Cu‐O thin films on (001)MgO by a chemical spray pyrolysis method Chu, J. J.; Liu, R. S.; Kung, J. H. Journal of Applied Physics, Vol. 64, Issue 5 https://doi.org/10.1063/1.342497	journal	September 1988
Bismuth strontium calcium copper oxide high-Tc superconducting films from nitrate precursors Cooper, Emanuel I.; Giess, Edward A.; Gupta, Arunava Materials Letters, Vol. 7, Issue 1-2 https://doi.org/10.1016/0167-577X(88)90069-9	journal	August 1988
High Tc superconducting films prepared by pyrolysis of an ultrasonic-generated aerosol Langlet, M.; Senet, E.; Deschanvres, J. L. Journal of the Less Common Metals, Vol. 151 https://doi.org/10.1016/0022-5088(89)90345-7	journal	May 1989
Synthesis of small particle size YBa2Cu3O7−x by a vapor phase process Pebler, A.; Charles, R. G. Materials Research Bulletin, Vol. 23, Issue 9 https://doi.org/10.1016/0025-5408(88)90122-5	journal	September 1988
Chemical vapor deposition of the superconducting YBa ₂ Cu ₃ O _{7− x} phase using halides as metal sources Ottosson, M.; Andersson, T.; Carlsson, J. ‐O. Applied Physics Letters, Vol. 54, Issue 24 https://doi.org/10.1063/1.101540	journal	June 1989
Preparation and characterization of copper(II) oxide thin films grown by a novel spray pyrolysis method DeSisto, W.; Sosnowski, M.; Smith, F. Materials Research Bulletin, Vol. 24, Issue 6 https://doi.org/10.1016/0025-5408(89)90093-7	journal	June 1989
Aerosol flow reactor production of fine Y ₁ Ba ₂ Cu ₃ O ₇ powder: Fabrication of superconducting ceramics Kodas, T. T.; Engler, E. M.; Lee, V. Y. Applied Physics Letters, Vol. 52, Issue 19 https://doi.org/10.1063/1.99703	journal	May 1988
Formation of Y-Ba-Cu-O Superconducting Film by a Spray Pyrolysis Method Kawai, Maki; Kawai, Tomoji; Masuhira, Hiromi Japanese Journal of Applied Physics, Vol. 26, Issue Part 2, No. 10 https://doi.org/10.1143/JJAP.26.L1740	journal	October 1987
Generation of thick Ba ₂ YCu ₃ O ₇ films by aerosol deposition Kodas, T. T.; Engler, E. M.; Lee, V. Y. Applied Physics Letters, Vol. 54, Issue 19 https://doi.org/10.1063/1.101497	journal	May 1989

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Related Subjects

/505/427/
addition
aerosol
article
article comprising
atoms
capable
carrier
carrier gas
characterized
chemical
chemical vapor
coated
coated article
coating
combination
compounds
compounds capable
comprised
comprising
conforming
consisting
contained
contract
decompose
decomposition
decomposition temperature
department
deposited
deposition
deposition technique
deposition techniques
disclosed
energy
evaporate
field
film
film coating
films
forming
gallate
gas
heated
heated zone
including
lanthanum
magnesium
magnesium oxide
metal
metal atom
metal atoms
metal oxide
multicomponent
oxide
oxide film
oxide films
oxide including
oxygen-containing
particularly
passing
precursor
precursor compound
precursor compounds
preparing
process
relates
result
sapphire
selected
silicon
solution
solution comprised
solvent
stabilized zirconium
substantially
substantially uniform
substrate
substrate selected
sufficient
sufficient temperature
suitable
suitable oxygen
suitable solvent
surface
techniques
temperature
temperature sufficient
temperatures
thickness
uniform
uniform thickness
vapor
vapor deposition
volatilize
volatilized
volatilizing
w-7405-eng-36
whereby
yttrium-stabilized
zirconium
zirconium oxide
zone

Aerosol chemical vapor deposition of metal oxide films

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References (9)

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