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Title: Aerosol chemical vapor deposition of metal oxide films

Abstract

A process of preparing a film of a multicomponent metal oxide including: forming an aerosol from a solution comprised of a suitable solvent and at least two precursor compounds capable of volatilizing at temperatures lower than the decomposition temperature of said precursor compounds; passing said aerosol in combination with a suitable oxygen-containing carrier gas into a heated zone, said heated zone having a temperature sufficient to evaporate the solvent and volatilize said precursor compounds; and passing said volatilized precursor compounds against the surface of a substrate, said substrate having a sufficient temperature to decompose said volatilized precursor compounds whereby metal atoms contained within said volatilized precursor compounds are deposited as a metal oxide film upon the substrate is disclosed. In addition, a coated article comprising a multicomponent metal oxide film conforming to the surface of a substrate selected from the group consisting of silicon, magnesium oxide, yttrium-stabilized zirconium oxide, sapphire, or lanthanum gallate, said multicomponent metal oxide film characterized as having a substantially uniform thickness upon said FIELD OF THE INVENTION The present invention relates to the field of film coating deposition techniques, and more particularly to the deposition of multicomponent metal oxide films by aerosol chemical vapor deposition. Thismore » invention is the result of a contract with the Department of Energy (Contract No. W-7405-ENG-36).« less

Inventors:
 [1];  [2]
  1. (4745 Trinity Dr., Los Alamos, NM 87544)
  2. (5200 Noreen Dr. NE., Albuquerque, NM 87111)
Publication Date:
Research Org.:
Los Alamos National Laboratory (LANL), Los Alamos, NM
OSTI Identifier:
869121
Patent Number(s):
US 5278138
Assignee:
Ott, Kevin C. (4745 Trinity Dr., Los Alamos, NM 87544);Kodas, Toivo T. (5200 Noreen Dr. NE., Albuquerque, NM 87111) LANL
DOE Contract Number:  
W-7405-ENG-36
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
aerosol; chemical; vapor; deposition; metal; oxide; films; process; preparing; film; multicomponent; including; forming; solution; comprised; suitable; solvent; precursor; compounds; capable; volatilizing; temperatures; decomposition; temperature; passing; combination; oxygen-containing; carrier; gas; heated; zone; sufficient; evaporate; volatilize; volatilized; surface; substrate; decompose; whereby; atoms; contained; deposited; disclosed; addition; coated; article; comprising; conforming; selected; consisting; silicon; magnesium; yttrium-stabilized; zirconium; sapphire; lanthanum; gallate; characterized; substantially; uniform; thickness; field; relates; coating; techniques; particularly; result; contract; department; energy; w-7405-eng-36; solution comprised; compounds capable; metal atom; article comprising; oxide films; suitable solvent; uniform thickness; chemical vapor; carrier gas; metal oxide; vapor deposition; substantially uniform; temperature sufficient; magnesium oxide; oxide film; zirconium oxide; deposition techniques; film coating; decomposition temperature; metal atoms; precursor compounds; suitable oxygen; stabilized zirconium; heated zone; sufficient temperature; deposition technique; coated article; precursor compound; substrate selected; oxide including; /505/427/

Citation Formats

Ott, Kevin C., and Kodas, Toivo T. Aerosol chemical vapor deposition of metal oxide films. United States: N. p., 1994. Web.
Ott, Kevin C., & Kodas, Toivo T. Aerosol chemical vapor deposition of metal oxide films. United States.
Ott, Kevin C., and Kodas, Toivo T. Sat . "Aerosol chemical vapor deposition of metal oxide films". United States. https://www.osti.gov/servlets/purl/869121.
@article{osti_869121,
title = {Aerosol chemical vapor deposition of metal oxide films},
author = {Ott, Kevin C. and Kodas, Toivo T.},
abstractNote = {A process of preparing a film of a multicomponent metal oxide including: forming an aerosol from a solution comprised of a suitable solvent and at least two precursor compounds capable of volatilizing at temperatures lower than the decomposition temperature of said precursor compounds; passing said aerosol in combination with a suitable oxygen-containing carrier gas into a heated zone, said heated zone having a temperature sufficient to evaporate the solvent and volatilize said precursor compounds; and passing said volatilized precursor compounds against the surface of a substrate, said substrate having a sufficient temperature to decompose said volatilized precursor compounds whereby metal atoms contained within said volatilized precursor compounds are deposited as a metal oxide film upon the substrate is disclosed. In addition, a coated article comprising a multicomponent metal oxide film conforming to the surface of a substrate selected from the group consisting of silicon, magnesium oxide, yttrium-stabilized zirconium oxide, sapphire, or lanthanum gallate, said multicomponent metal oxide film characterized as having a substantially uniform thickness upon said FIELD OF THE INVENTION The present invention relates to the field of film coating deposition techniques, and more particularly to the deposition of multicomponent metal oxide films by aerosol chemical vapor deposition. This invention is the result of a contract with the Department of Energy (Contract No. W-7405-ENG-36).},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1994},
month = {1}
}

Patent:

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