Annular dark field electron microscope images with better than 2 A resolution at 100 kV

Journal Article · Mon Dec 04 04:00:00 EST 1989 · Applied Physics Letters; (USA)

DOI:https://doi.org/10.1063/1.102297· OSTI ID:5043059

Shin, D H; Kirkland, E J; Silcox, J ^[1]

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1. School of Applied and Engineering Physics, Cornell University, Ithaca, New York 14853 (US)

High-resolution scanning transmission electron microscope (STEM) images in the annular dark field (ADF) imaging mode approaching the theoretical point-to-point resolution limit are presented. The ADF images were obtained from a high {ital T}{sub {ital c}} superconducting YBa{sub 2}Cu{sub 3}O{sub 7{minus}{ital x}} thin-film specimen at 100 kV. The 1.9 A resolution lattice image, which is the smallest lattice spacing in the specimen, corresponds to the minimum resolvable spatial frequency with 5% contrast in the contrast transfer function for annular dark field, and is smaller than the resolution limit given by the Rayleigh criterion. This demonstrates that STEM ADF imaging can have a resolution approximately 40% better than that of the bright field conventional transmission electron microscope (CTEM) imaging at Scherzer condition.

• OSTI ID: 5043059
• Journal Information: Applied Physics Letters; (USA), Journal Name: Applied Physics Letters; (USA) Vol. 55:23; ISSN APPLA; ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360202* -- Ceramics
Cermets
& Refractories-- Structure & Phase Studies
37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
400101 -- Activation
Nuclear Reaction
Radiometric & Radiochemical Procedures
656100 -- Condensed Matter Physics-- Superconductivity
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALKALINE EARTH METAL COMPOUNDS
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
COPPER COMPOUNDS
COPPER OXIDES
CRYSTAL STRUCTURE
DATA
ELECTRON MICROSCOPY
EXPERIMENTAL DATA
FILMS
IMAGES
INFORMATION
LATTICE PARAMETERS
MICROSCOPY
NUMERICAL DATA
OXIDES
OXYGEN COMPOUNDS
RESOLUTION
SCANNING ELECTRON MICROSCOPY
SUPERCONDUCTING FILMS
SURFACES
TRANSITION ELEMENT COMPOUNDS
TRANSMISSION ELECTRON MICROSCOPY
YTTRIUM COMPOUNDS
YTTRIUM OXIDES