Sub-0.1 nm-resolution quantitative scanning transmission electron microscopy without adjustable parameters

Journal Article · Mon May 07 04:00:00 EDT 2012 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.4711766· OSTI ID:22025545

Dwyer, C ^[1]; Maunders, C ^[2]; Zheng, C L ^[1]; Weyland, M; Etheridge, J ^[1]; Tiemeijer, P C ^[3]

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1. Monash Centre for Electron Microscopy, Monash University, Victoria 3800 (Australia)
2. Department of Materials Engineering, Monash University, Victoria 3800 (Australia)
3. FEI Electron Optics, P.O. Box 80066, 5600 KA Eindhoven (Netherlands)

Atomic-resolution imaging in the scanning transmission electron microscope (STEM) constitutes a powerful tool for nanostructure characterization. Here, we demonstrate the quantitative interpretation of atomic-resolution high-angle annular dark-field (ADF) STEM images using an approach that does not rely on adjustable parameters. We measure independently the instrumental parameters that affect sub-0.1 nm-resolution ADF images, quantify their individual and collective contributions to the image intensity, and show that knowledge of these parameters enables a quantitative interpretation of the absolute intensity and contrast across all accessible spatial frequencies. The analysis also provides a method for the in-situ measurement of the STEM's effective source distribution.

• OSTI ID: 22025545
• Journal Information: Applied Physics Letters, Journal Name: Applied Physics Letters Journal Issue: 19 Vol. 100; ISSN APPLAB; ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
77 NANOSCIENCE AND NANOTECHNOLOGY
IMAGES
NANOSTRUCTURES
RESOLUTION
SCANNING ELECTRON MICROSCOPY
TRANSMISSION ELECTRON MICROSCOPY