LOW-ENERGY SPUTTERING STUDIES. Annual Report, July 15, 1960 to July 14, 1961
A study is made on the sputtering of gold and aluminum by beams of noble gases at normal incidence between 0 and 1000 ev. Gold is bombarded by He/sup +/, Ne/sup +/, Ar/sup +/, and Xe/sup +/, and aluminum by Ne/sup +/, Ar/sup +/, and Kr/ sup +/. Sputtering is measured by the crystal oscillator method. Using 20-Mc crystals in the oscillator, it is possible to detect the average removal of 0.01 angstrom from a surface by sputtering. Secondary electron emission from the target is suppressed, and sputtering yields ( mu ) are given in atoms per ion. The increase in mu with beam energy is a nearly linear function in terms of mu /(1 + gamma ), where gamma is the number of secondary electrons emitted per incident ion. The experimental results are analyzed in the light of theories on sputtering yields and thresholds. (auth)
- Research Organization:
- General Dynamics/Astronautics, San Diego, Calif.
- NSA Number:
- NSA-16-009280
- OSTI ID:
- 4807126
- Report Number(s):
- ERR-AN-072
- Country of Publication:
- United States
- Language:
- English
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