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ULTRA-HIGH VACUUM USE OF BAYARD-ALPERT IONIZATION GAUGES

Journal Article · · Rev. Sci. Instr.
DOI:https://doi.org/10.1063/1.1718330· OSTI ID:4741154
Comparisons are made between the collected ion current vs electron emission current for a nude'' gage (Veeco BGT-75) and a glass enclosed gage (Veeco RG-75) both of the Bayard-Alpert type. The ion current is directly proportional to the electron current for the nude gage, when the electron current is 100 mu a or less, down to ion currents as low as the x-ray limit of the gage which is 3 x 10/sup -10/ Torr. Good agreement between the glass and nude gages is obtained over the limited range of electron currents where the glass gage exhibits proportional behavior. A getter-ion pumped ultra-high vacuum system was used for the experiments. (auth)
Research Organization:
Texas Instruments, Inc., Dallas
Sponsoring Organization:
USDOE
NSA Number:
NSA-17-018580
OSTI ID:
4741154
Journal Information:
Rev. Sci. Instr., Journal Name: Rev. Sci. Instr. Vol. Vol: 34
Country of Publication:
Country unknown/Code not available
Language:
English

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