NONPROPORTIONALITY IN BAYARD-ALPERT IONIZATION GAUGE AND THE ULTIMATE VACUUM DETERMINATION OF DIFFUSION PUMPS
The nonproportionality between the ion current and the electron current in a Bayard-Alpert ionization gage is systematically examined and theoretically treated. The effective pumping speed is so modified as to include the effect of back diffusion of oil vapor from the diffusion pump and the contribution of ionization pumping. The theory is experimentally verified in some respects to deduce a new criterion for the maximum attainable vacuum with the diffusion pump. Oil and mercury diffusion pumps are compared to deduce the superiority of mercury pumps for obtaining "ultra-high" vacuum. The best vacuum (in normal working conditions) is 10/sup -9/ approximately 10/sup -8/ mm Hg with oil and 10/sup - 11/ mm Hg with mercury. (auth)
- Research Organization:
- Nippon Telegraph and Telephone Public Corp., Tokyo
- Sponsoring Organization:
- USDOE
- NSA Number:
- NSA-14-007585
- OSTI ID:
- 4196598
- Journal Information:
- Rev. Sci. Instr., Journal Name: Rev. Sci. Instr. Vol. Vol: 30
- Country of Publication:
- Country unknown/Code not available
- Language:
- English
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