Electron microscopy investigation Si and Mo field emitters coated with diamond powder by dielectrophoresis
- North Carolina State Univ., Raleigh, NC (United States)
Silicon and molybdenum are commonly used to fabricate field emission devices, which have promising applications in the flat panel display and vacuum microelectronics industries. However, uncoated Si and Mo field emitters usually exhibit oscillating currents during extended operation due to surface contaminant adsorption and desorption. Coating these cathodes with diamond by microwave plasma chemical vapor deposition (MPCVD) has been shown to considerably improve the total electron emission current as well as to enhance the emission current stability. A very simple, inexpensive technique for depositing high pressure, high temperature (HPHT) synthetic diamond powder on Si and Mo emitters was recently developed and also shows greatly enhanced current-voltage characteristics. Since field electron emission from a cathode strongly depends on the emitter morphology, the diamond coating morphology and the diamond/Si and diamond/Mo interface microstructures were analyzed by electron microscopy.
- OSTI ID:
- 468942
- Report Number(s):
- CONF-960877-; TRN: 97:001308-0200
- Resource Relation:
- Conference: Microscopy and microanalysis 1996, Minneapolis, MN (United States), 11-15 Aug 1996; Other Information: PBD: 1996; Related Information: Is Part Of Microscopy and microanalysis 1996; Bailey, G.W.; Corbett, J.M.; Dimlich, R.V.W.; Michael, J.R.; Zaluzec, N.J. [eds.]; PB: 1107 p.
- Country of Publication:
- United States
- Language:
- English
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