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Field emission from diamond coated molybdenum field emitters

Journal Article · · Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena
DOI:https://doi.org/10.1116/1.588984· OSTI ID:288174
 [1];  [2]; ;  [1];  [3]; ;  [1]
  1. Department of Materials Science and Engineering, North Carolina State University, Raleigh, North Carolina 27695 (United States)
  2. United States Army Research Laboratory, Fort Monmouth, New Jersey 07703 (United States)
  3. Institute of Crystallography, 117333 Moscow (Russia)

Diamond deposition onto single Mo field emitters was accomplished by two methods: microwave plasma chemical vapor deposition and a dielectrophoresis of diamond powder. Observation by transmission electron microscopy and scanning electron microscopy revealed a significant amount of deposition at the tips. The field emission characteristics were measured before and after diamond deposition on the same emitters. Field emission from diamond coated emitters yielded significant increases in emission current and lower Fowler{endash}Nordheim slopes. We discuss a possible mechanism to explain current enhancement that depends primarily upon the Mo-diamond interface. {copyright} {ital 1996 American Vacuum Society}

OSTI ID:
288174
Report Number(s):
CONF-9507110--
Journal Information:
Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena, Journal Name: Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena Journal Issue: 3 Vol. 14; ISSN 0734-211X; ISSN JVTBD9
Country of Publication:
United States
Language:
English

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