Effect of film thickness and substrate surface treatment on substrate deformation: DLC on MgO

Book · Thu May 01 04:00:00 EDT 1997

OSTI ID:467611

Strojny, A; Lilleodden, E T; Wang, G; Sivertsen, J V; Gerberich, W W ^[1]

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1. Univ. of Minnesota, Minneapolis, MN (United States). Dept. of Chemical Engineering and Material Science

Diamond-Like Carbon films with thicknesses controlled in the 10 to 100 nm range were sputter-deposited on single crystals of MgO. The substrates were prepared with varying roughness from 5 to 50 nm and varying surface dislocation densities from 100 to 2,000 disl./{micro}m{sup 2}. Mechanical properties of the film and film-substrate interactions were investigated with an atomic force microscope retrofitted with a diamond indenter. The load bearing capacity of the substrate increased with increasing film thickness. As the indenter approached the film-substrate interface, load excursions occurred for the thinner films. No excursion was found for the thick film. Load excursions may be attributed to dislocations nucleating at the interface and/or film delamination.

• OSTI ID: 467611
• Report Number(s): CONF-960401--; ISBN 1-55899-339-8
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
CARBON
DEFORMATION
DISLOCATIONS
EXPERIMENTAL DATA
INTERFACES
MAGNESIUM OXIDES
MECHANICAL PROPERTIES
PHYSICAL VAPOR DEPOSITION
ROUGHNESS
SPUTTERING
SUBSTRATES
SURFACE TREATMENTS
THIN FILMS