Nonlinear acoustic response in thin oxide layers on fused silica
Book
·
OSTI ID:467606
- Schott Glaswerke, Mainz (Germany)
- Fraunhofer Inst. for NDT, Saarbruecken (Germany)
Nonlinear mechanical properties of layered systems of Ta{sub 2}O{sub 5} and TiO{sub 2} films deposited on fused silica by reactive evaporation (RE), reactive ion plating (IP) and spin coating (SC) are investigated by means of an ultrasonic technique. The coatings with thickness of 100 nm possess differences in density and crystal structure, due to the different deposition conditions. The nonlinear acoustic response of the film/substrate systems depends on film material. Differences are observed in respect to film density as obtained by the alternate deposition methods. The origin of the differences in nonlinear acoustic response of the samples is discussed. The results are correlated to adhesion properties of the films determined by a scratch-test method.
- OSTI ID:
- 467606
- Report Number(s):
- CONF-960401--; ISBN 1-55899-339-8
- Country of Publication:
- United States
- Language:
- English
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