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FILM DEPOSITION USING ACCELERATED IONS

Journal Article · Tue Sep 01 04:00:00 EDT 1964 · Electrochemical Technology (U.S.) Absorbed by J. Electrochem. Soc.

OSTI ID:4672659

Mattox, D M

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Research Organization:: Sandia Corp., Albuquerque, N. Mex.

NSA Number:: NSA-19-007879

OSTI ID:: 4672659

Report Number(s):: TID-18639; 0424-8090

Journal Information:: Electrochemical Technology (U.S.) Absorbed by J. Electrochem. Soc. , Journal Name: Electrochemical Technology (U.S.) Absorbed by J. Electrochem. Soc. Vol. Vol: 2; ISSN ECTCA

Country of Publication:: Country unknown/Code not available

Language:: English

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Related Subjects

ADHERENCE
FILMS
Fabrication
IONS
METALS
METALS, CERAMICS, AND OTHER MATERIALS
PRECIPITATION
PREPARATION
THICKNESS