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U.S. Department of Energy
Office of Scientific and Technical Information

CO sensing properties of SnO{sub 2} thin films prepared by the sol-gel process

Conference ·
OSTI ID:441290
; ; ;  [1]
  1. Instituto Materiali per l`Elettronica, Lecce (Italy); and others
An investigation of the electrical conductivity of the films exposed to various level of carbon oxide (CO) was also carried-out. Electrical measurements in controlled atmosphere showed that the gas sensing characteristics are different for pure and Pd:SnO{sub 2}. In particular Pd doped thin films show a higher sensitivity to carbon monoxide gas and an optimum operating temperature lower than pure SnO{sub 2} films. In conclusion, a comparison with SnO{sub 2} films grown by means of the reactive sputtering method suggest that sol-gel process is a good method for CO sensors preparation with the advantage of a lower cost of production. Long-term stability measurements allowed us to control the reliability of the realized devices.
OSTI ID:
441290
Report Number(s):
CONF-960782--
Country of Publication:
United States
Language:
English