Fabrication of CO sensing film by sol-gel method for application to microsensor
Conference
·
OSTI ID:441271
- Semyung Univ., Jecheon (Korea, Republic of)
- National Univ., Taegu (Korea, Republic of)
- Kyshu Univ., Fukuoka (Japan)
The most commonly used methods for the preparation of sensing film of micro-gas sensors are physical methods such as r.f. sputtering, thermal evaporation, spary pyrolysis and CVD. Though it is somewhat difficult to be compatible with microelectronic processes, the chemical preparation method such as sol-gel method has many advantages over the physical ones like additive incorporation and surface control. In this experiment, the authors have prepared tin oxide thin film by sol-gel method combined with spin-coating. The compatibility of the film process to the microelectronic process and CO gas sensing characteristics of the fabricated film have been investigated.
- OSTI ID:
- 441271
- Report Number(s):
- CONF-960782--
- Country of Publication:
- United States
- Language:
- English
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