Contamination of hybrid microcircuit mirrors by oxidized tantalum
Technical Report
·
OSTI ID:4357271
occasion, resulted in a gold film which is noticeably darker than the normal bright gold. Auger electron spectroscopy identified the surface contamination as tantalum oxide. TaO/sub x/ is evaporated from the Au deposition boat after the Au change has been depleted. Maintaining a high mole fraction of Au in the deposition boat should eliminate the problem. (auth)
- Research Organization:
- Sandia Labs., Albuquerque, N.Mex. (USA)
- DOE Contract Number:
- AT(29-1)-789
- NSA Number:
- NSA-29-015190
- OSTI ID:
- 4357271
- Report Number(s):
- SLA--73-1019
- Country of Publication:
- United States
- Language:
- English
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