Adhesion enhancement of ion beam mixed Cu/Al/polyimide

Journal Article · Wed Jan 01 04:00:00 EST 1997 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.363999· OSTI ID:435097

Chang, G S; Jung, S M; Lee, Y S; Choi, I S; Whang, C N ^[1]; Woo, J J ^[2]; Lee, Y P ^[3]

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1. Department of Physics, Yonsei University, Seoul 120-749 (Korea)
2. Department of Physics, Chonnam National University, Kwangju 500-757 (Korea)
3. Department of Physics, Sunmoon University, Asan 336-840 (Korea)

Cu (400 {Angstrom})/polyimide was mixed with 80 keV Ar{sup +} and N{sub 2}{sup +} from 1.0{times}10{sup 15} to 2.0{times}10{sup 16} ions/cm{sup 2}. The same processes were repeated for the Cu (400 {Angstrom})/Al (50 {Angstrom})/polyimide system which has Al as a buffer layer. The quantitative adhesion strength was measured by a standard scratch test. X-ray photoelectron spectroscopy was employed to investigate the change in the chemical bonds of the ion beam mixed polyimide substrate and the intermediate effects for the adhesion enhancement in Cu/Al/polyimide. Two distinct tendencies are observed in the adhesion strength: Cu/Al/polyimide is more adhesive than Cu/polyimide after ion beam mixing, and N{sub 2}{sup +} ions are more effective in the adhesion enhancement than Ar{sup +}. The formation of an interlayer compound of CuAl{sub 2}O{sub 4} accounts for the former, while the latter is understood by the fact that N{sub 2}{sup +} ions produce more pyridinelike moiety, amide group and tertiary amine moiety which are known as adhesion promoters. {copyright} {ital 1997 American Institute of Physics.}

• OSTI ID: 435097
• Journal Information: Journal of Applied Physics, Journal Name: Journal of Applied Physics Journal Issue: 1 Vol. 81; ISSN JAPIAU; ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
ADHESION
ALUMINIUM
ARGON IONS
CHEMICAL BONDS
COPPER
DIFFUSION
INTEGRATED CIRCUITS
KEV RANGE 10-100
LAYERS
NITROGEN IONS
PHOTOELECTRON SPECTROSCOPY
PHYSICAL RADIATION EFFECTS
POLYMERS
ion beam mixing