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Interaction of cavities and dislocations in semiconductors

Conference ·
OSTI ID:434343

TEM of He-implanted Si-Ge and InGaAs indicates an attractive interaction between cavities and dislocations. Calculation indicates that cavities are attracted to dislocations through surrounding strain fields, and strong binding (100s of eV) occurs when a cavity intersects the core. In a strained SiGe/Si heterostructure, He implantation enhances relaxation rates and cavities bound to misfit dislocations show evidence of increasing relaxation at equilibrium by lowering dislocation energies. The interaction is expected for all crystalline solids and gives insight into voids in GaN/sapphire and bubbles in He-implanted metals.

Research Organization:
Sandia National Labs., Albuquerque, NM (United States)
Sponsoring Organization:
USDOE Office of Energy Research, Washington, DC (United States)
DOE Contract Number:
AC04-94AL85000
OSTI ID:
434343
Report Number(s):
SAND--96-1714C; CONF-961202--11; ON: DE97001850
Country of Publication:
United States
Language:
English