Effect of pressure on the properties of reactively sputtered Ta$sub 2$$O$$sub 5$
Journal Article
·
· J. Vac. Sci. Technol., v. 11, no. 1, pp. 381-384
- Research Organization:
- Bell-Northern Research, Ottawa, Canada
- Sponsoring Organization:
- USDOE
- NSA Number:
- NSA-30-007273
- OSTI ID:
- 4301646
- Journal Information:
- J. Vac. Sci. Technol., v. 11, no. 1, pp. 381-384, Other Information: Orig. Receipt Date: 31-DEC-74
- Country of Publication:
- United States
- Language:
- English
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