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Growth of polycrystalline scandium nitride by ECR-MBE

Book ·
OSTI ID:417645
;  [1];  [2]
  1. Boston Univ., MA (United States). Dept. of Electrical and Computer Engineering
  2. Exxon Research and Engineering Co., Annandale, NJ (United States)

The authors report the growth of polycrystalline scandium nitride (ScN) films by electron cyclotron resonance plasma assisted molecular beam epitaxy (ECR-MBE). The films were grown on (0001) sapphire substrates. The ScN films were found to have the sodium chloride structure (a = 4.5 {angstrom}) with crystals oriented along the (111) direction perpendicular to the substrates. X-ray photoemission spectroscopy (XPS) studies indicate that the films are stoichiometric with no evidence of free scandium metal. Films 1 to 2 {micro}m thick have a deep-red color and transmission measurements indicate a fundamental absorption edge at 2.1 eV. These results are consistent with ScN being a semiconductor, rather than a semimetal.

OSTI ID:
417645
Report Number(s):
CONF-960502--; ISBN 1-56677-163-3
Country of Publication:
United States
Language:
English