DEPENDENCE OF SPUTTERING EFFICIENCY ON ION ENERGY AND ANGLE OF INCIDENCE.
Journal Article
·
· Radiat. Eff. 7: 179-86(Feb 1971).
- Research Organization:
- Univ. of Aarhus, Denmark
- Sponsoring Organization:
- USDOE
- NSA Number:
- NSA-25-033052
- OSTI ID:
- 4079070
- Journal Information:
- Radiat. Eff. 7: 179-86(Feb 1971)., Other Information: Orig. Receipt Date: 31-DEC-71
- Country of Publication:
- Country unknown/Code not available
- Language:
- English
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Related Subjects
N32210* -Physics-Atomic & Molecular Physics-Atomic
Electron
Ion & Molecular Beams & Reactions
ANGULAR CORRELATION
ARGON
COPPER
EFFICIENCY
ENERGY
IONS
KEV RANGE 10-100
KEV RANGE 100-1000
KRYPTON
LEAD
MASS
MEV RANGE 01-10
NEON
SILVER
SPUTTERING
XENON
NEON IONS/reactions with copper, silver, and lead at 25 to 1200 keV, effects of energy and incident angle on efficiency of sputtering, (E)
ARGON IONS/reactions with copper, silver, and lead at 25 to 1200 keV, effects of energy and incident angle on efficiency of sputtering, (E)
COPPER IONS/reactions with copper, silver, and lead at 25 to 1200 keV, effects of energy and incident angle on efficiency of sputtering, (E)
LEAD IONS/reactions with copper, silver, and lead at 25 to 1200 keV, effects of energy and incident angle on efficiency of sputtering, (E)
XENON IONS/reactions with copper, silver, and lead at 25 to 1200 keV, effects of energy and incident angle on efficiency of sputtering, (E)
SILVER/sputtering of
effects of incident angle on efficiency of
(E)
COPPER/sputtering of
effects of ion energy and incident angle on efficiency of
(E)
KRYPTON IONS/reactions with copper, silver, and lead at 25 to 1200 keV, effects of energy and incident angle on efficiency of sputtering, (
Electron
Ion & Molecular Beams & Reactions
ANGULAR CORRELATION
ARGON
COPPER
EFFICIENCY
ENERGY
IONS
KEV RANGE 10-100
KEV RANGE 100-1000
KRYPTON
LEAD
MASS
MEV RANGE 01-10
NEON
SILVER
SPUTTERING
XENON
NEON IONS/reactions with copper, silver, and lead at 25 to 1200 keV, effects of energy and incident angle on efficiency of sputtering, (E)
ARGON IONS/reactions with copper, silver, and lead at 25 to 1200 keV, effects of energy and incident angle on efficiency of sputtering, (E)
COPPER IONS/reactions with copper, silver, and lead at 25 to 1200 keV, effects of energy and incident angle on efficiency of sputtering, (E)
LEAD IONS/reactions with copper, silver, and lead at 25 to 1200 keV, effects of energy and incident angle on efficiency of sputtering, (E)
XENON IONS/reactions with copper, silver, and lead at 25 to 1200 keV, effects of energy and incident angle on efficiency of sputtering, (E)
SILVER/sputtering of
effects of incident angle on efficiency of
(E)
COPPER/sputtering of
effects of ion energy and incident angle on efficiency of
(E)
KRYPTON IONS/reactions with copper, silver, and lead at 25 to 1200 keV, effects of energy and incident angle on efficiency of sputtering, (