Noble-gas ion sputtering yield of gold and copper: Dependence on the energy and angle of incidence of the projectiles

Journal Article · Sun Feb 15 00:00:00 EST 1987 · Phys. Rev. B: Condens. Matter; (United States)

DOI:https://doi.org/10.1103/PhysRevB.35.2198· OSTI ID:6838905

Oliva-Florio, A; Baragiola, R A; Jakas, M M; Alonso, E V; Ferron, J

We have measured the sputtering yield of Au and Cu targets as a function of energy and the angle of incidence of noble-gas projectiles in the energy range 2--50 keV. The experimental results were compared with the analytical theory of sputtering and with computer simulations. Our study indicates that the linear-cascade model is applicable only asymptotically for low nuclear stopping powers.

• Research Organization: Centro Atomico Bariloche and Instituto Balseiro, 8400 San Carlos de Bariloche, Rio Negro, Argentina
• OSTI ID: 6838905
• Journal Information: Phys. Rev. B: Condens. Matter; (United States), Vol. 35:5
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
COPPER
SPUTTERING
GOLD
RARE GASES
COLLISIONS
ANALYTICAL SOLUTION
CASCADE THEORY
COMPUTERIZED SIMULATION
ENERGY DEPENDENCE
FILMS
KEV RANGE 01-10
KEV RANGE 10-100
QUARTZ
SUBSTRATES
CHALCOGENIDES
ELEMENTS
ENERGY RANGE
FLUIDS
GASES
KEV RANGE
METALS
MINERALS
NONMETALS
OXIDE MINERALS
OXIDES
OXYGEN COMPOUNDS
SILICON COMPOUNDS
SILICON OXIDES
SIMULATION
TRANSITION ELEMENTS
640301* - Atomic
Molecular & Chemical Physics- Beams & their Reactions