DEPENDENCE OF THE SPUTTERING COEFFICIENTS OF POLYCRYSTALLINE TARGETS ON THE ANGLE OF INCIDENCE OF IONS.
Journal Article
·
· Sov. Phys.-Solid State (Engl. Transl.), 9: 1967-70(Mar. 1968).
OSTI ID:4544999
- Research Organization:
- Moscow State Univ.
- NSA Number:
- NSA-22-021870
- OSTI ID:
- 4544999
- Journal Information:
- Sov. Phys.-Solid State (Engl. Transl.), 9: 1967-70(Mar. 1968)., Other Information: Orig. Receipt Date: 31-DEC-68; Related Information: Translated from Fiz. Tverd. Tela, 9: 2503-7(Sept. 1967).
- Country of Publication:
- Country unknown/Code not available
- Language:
- English
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STUDY OF THE SPUTTERING YIELD AND THE COEFFICIENT OF SECONDARY EMISSION FOR POLYCRYSTALLINE METALLIC TARGETS BOMBARDED WITH Hg$sup +$ IONS IN THE ENERGY RANGE 5 TO 30 keV.
Journal Article
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Wed Feb 01 00:00:00 EST 1961
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OSTI ID:4544999
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Journal Article
·
Thu Jan 01 00:00:00 EST 1970
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·
OSTI ID:4544999
STUDY OF THE SPUTTERING YIELD AND THE COEFFICIENT OF SECONDARY EMISSION FOR POLYCRYSTALLINE METALLIC TARGETS BOMBARDED WITH Hg$sup +$ IONS IN THE ENERGY RANGE 5 TO 30 keV.
Journal Article
·
Thu Jan 01 00:00:00 EST 1970
· Rev. Phys. Appl. 5: 759-64(Oct 1970).
·
OSTI ID:4544999
Related Subjects
N32210* -Physics-Atomic & Molecular Physics-Atomic
Electron
Ion & Molecular Beams & Reactions
ANGULAR DISTRIBUTION
ARGON
COPPER
CRYSTALS
IONS
KEV RANGE
KRYPTON
MOLYBDENUM
NEON
NICKEL
SILVER
SPUTTERING
ARGON IONS/sputtering on polycrystalline targets at 30 keV
effects of angle of incidence on coefficients for
(E)
NICKEL/sputtering coefficients for argon, krypton, and neon ions of 30 keV on polycrystalline, effects of angle of incidence on, (E)
SILVER/sputtering coefficients for argon, krypton, and neon ions of 30 keV on polycrystalline, effects of angle of incidence on, (E)
COPPER/sputtering coefficients for argon, krypton, and neon ions of 30 keV on polycrystalline, effects of angle of incidence on, (E)
KRYPTON IONS/sputtering on polycrystalline targets at 30 keV
effects of angle of incidence on coefficients for
(E)
NEON IONS/sputtering on polycrystalline targets at 30 keV
effects of angle of incidence on coefficients for
(E)
MOLYBDENUM/sputtering coefficients for argon, krypton, and neon ions of 30 keV on polycrystalline, effects of angle of incidence on, (E)
Electron
Ion & Molecular Beams & Reactions
ANGULAR DISTRIBUTION
ARGON
COPPER
CRYSTALS
IONS
KEV RANGE
KRYPTON
MOLYBDENUM
NEON
NICKEL
SILVER
SPUTTERING
ARGON IONS/sputtering on polycrystalline targets at 30 keV
effects of angle of incidence on coefficients for
(E)
NICKEL/sputtering coefficients for argon, krypton, and neon ions of 30 keV on polycrystalline, effects of angle of incidence on, (E)
SILVER/sputtering coefficients for argon, krypton, and neon ions of 30 keV on polycrystalline, effects of angle of incidence on, (E)
COPPER/sputtering coefficients for argon, krypton, and neon ions of 30 keV on polycrystalline, effects of angle of incidence on, (E)
KRYPTON IONS/sputtering on polycrystalline targets at 30 keV
effects of angle of incidence on coefficients for
(E)
NEON IONS/sputtering on polycrystalline targets at 30 keV
effects of angle of incidence on coefficients for
(E)
MOLYBDENUM/sputtering coefficients for argon, krypton, and neon ions of 30 keV on polycrystalline, effects of angle of incidence on, (E)