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Scanning internal-photoemission microscopy: An imaging technique to reveal microscopic inhomogeneity at metal-semiconductor interfaces

Conference ·
OSTI ID:405548
 [1]
  1. Tokyo Metropolitan Univ., Hachiohji, Tokyo (Japan)

We have developed scanning internal-photoemission microscopy (SIPM) which is capable of imaging Schottky-barrier distribution at {open_quotes}buried{close_quotes} metal-semiconductor interfaces. By using this technique, inhomogeneous reaction at annealed interfaces of Ti/Pt/Au/GaAs and epitaxial-Al/Si(111) systems has been studied in relation to their microscopic as well as macroscopic electrical properties.

OSTI ID:
405548
Report Number(s):
CONF-951231--
Country of Publication:
United States
Language:
English