''IN-SITU'' ELECTRON MICROSCOPE INVESTIGATION OF THE NUCLEATION AND GROWTH OF SPUTTERED THIN FILMS. Annual Technical Progress Report, III.
- Research Organization:
- Minnesota Univ., Minneapolis. Dept. of Chemical Engineering and Materials Science
- NSA Number:
- NSA-25-018277
- OSTI ID:
- 4043573
- Report Number(s):
- COO-1790-3
- Resource Relation:
- Other Information: UNCL. Orig. Receipt Date: 31-DEC-71
- Country of Publication:
- United States
- Language:
- English
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