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Title: 'In-situ' electron microscope investigation of the nucleation and growth of sputtered thin films. Annual technical progress report VII

Technical Report ·
DOI:https://doi.org/10.2172/4219720· OSTI ID:4219720

Research Organization:
Minnesota Univ., Minneapolis (USA). Dept. of Chemical Engineering and Materials Science
Sponsoring Organization:
US Energy Research and Development Administration (ERDA)
NSA Number:
NSA-31-028920
OSTI ID:
4219720
Report Number(s):
COO-1790-7
Resource Relation:
Other Information: Orig. Receipt Date: 30-JUN-75
Country of Publication:
United States
Language:
English