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Title: ''In-situ'' electron microscope investigation of the nucleation and growth of sputtered thin films. Annual technical progress report V

Technical Report ·
DOI:https://doi.org/10.2172/4245380· OSTI ID:4245380

Research Organization:
Minnesota Univ., Minneapolis (USA). Dept. of Chemical Engineering and Materials Science
NSA Number:
NSA-31-011881
OSTI ID:
4245380
Report Number(s):
COO-1790-5
Resource Relation:
Other Information: Orig. Receipt Date: 30-JUN-75
Country of Publication:
United States
Language:
English