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Title: Surface photovoltage spectroscopy characterization of a GaAlAs/InGaAs/GaAs pseudomorphic high electron mobility transistor structure

Journal Article · · Applied Physics Letters
DOI:https://doi.org/10.1063/1.1392974· OSTI ID:40230757

Using room-temperature surface photovoltage spectroscopy (SPS), we have characterized a GaAlAs/InGaAs/GaAs pseudomorphic high electron mobility transistor (pHEMT) structure. Signals have been observed from every region of the sample. From a line shape fit to the normalized first derivative of the surface photovoltage signal with respect to photon energy, the two-dimensional electron gas density (N{sub s}) was obtained and found to be in good agreement with Hall measurement. The Al composition and the properties of the GaAs/GaAlAs superlattice buffer layer also were obtained from the SPS spectrum. The results demonstrate the considerable potential of SPS for the contactless and nondestructive characterization of pHEMT structures at room temperature. {copyright} 2001 American Institute of Physics.

Sponsoring Organization:
(US)
OSTI ID:
40230757
Journal Information:
Applied Physics Letters, Vol. 79, Issue 7; Other Information: DOI: 10.1063/1.1392974; Othernumber: APPLAB000079000007000949000001; 016133APL; PBD: 13 Aug 2001; ISSN 0003-6951
Publisher:
The American Physical Society
Country of Publication:
United States
Language:
English

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