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Si/6H--SiC(0001): An unexpected cubic 4 x 3 Si phase overlayer

Journal Article · · Applied Physics Letters
DOI:https://doi.org/10.1063/1.1389510· OSTI ID:40230698
We investigate Si deposition on the 6H--SiC(0001) 3 x 3 surface reconstruction by atom-resolved scanning tunneling microscopy. Upon thermal annealing, the Si thin film forms an unexpected structure having dimer rows in a cubic 4 x 3 surface array. Such a 4 x 3 Si phase has a very open surface very likely being at the origin of the exceptionally high reactivity to oxygen of the Si/6H--SiC(0001) system. These findings are relevant in silicon carbide oxidation. {copyright} 2001 American Institute of Physics.
Sponsoring Organization:
(US)
OSTI ID:
40230698
Journal Information:
Applied Physics Letters, Journal Name: Applied Physics Letters Journal Issue: 6 Vol. 79; ISSN 0003-6951
Publisher:
The American Physical Society
Country of Publication:
United States
Language:
English

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