High resolution X-ray diffraction analysis of piezoelectric LiNbO{sub 3} films

Book · Thu Oct 31 23:00:00 EST 1996

OSTI ID:392169

Shibata, Yoshihiko; Kuze, Naohiro; Matsui, Masahiro ^[1]; Kanai, Masaki; Kawai, Tomoji ^[2]

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1. Asahi Chemical Industry Co., Ltd., Fuji, Shizuoka (Japan)
2. Osaka Univ., Ibaraki, Osaka (Japan). Inst. of Scientific and Industrial Research

Thin LiNbO{sub 3} films are deposited on (001) sapphire and (001) LiTaO{sub 3} substrates by using pulsed excimer-laser ablation. These films are evaluated by high-resolution X-ray diffraction (HRXRD) analysis. Strained LiNbO{sub 3} films in which the a-axis is longer and the c-axis is shorter than those of LiNbO{sub 3} single crystals are deposited on the sapphire substrates. On the other hand, extremely high-quality LiNbO{sub 3} films in which the a-axis of the films is the same as that of substrates are grown on the LiTaO{sub 3} substrates. X-ray rocking curves for the (006) reflection showed very narrow full width at half maximum (FWHM) of 208 arcsec for the films on the sapphire substrates, and 9 arcsec for the films on LiTaO{sub 3} substrates.

• OSTI ID: 392169
• Report Number(s): CONF-951155--; ISBN 1-55899-304-5
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
42 ENGINEERING
ACOUSTIC MEASUREMENTS
CRYSTAL STRUCTURE
ELECTRONIC EQUIPMENT
ENERGY BEAM DEPOSITION
EXPERIMENTAL DATA
FERROELECTRIC MATERIALS
LASERS
LATTICE PARAMETERS
LITHIUM OXIDES
MATERIALS
MONOCRYSTALS
NIOBIUM OXIDES
SAPPHIRE
SUBSTRATES
TANTALATES
X-RAY DIFFRACTION